Fast Imaging Ellipsometer Using a LiNbO
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概要
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The LiNbO<inf>3</inf>electrooptic crystal has been used as a phase modulator in polarimetry for fast single-point measurements. This paper aims to extend the application of the LiNbO<inf>3</inf>electrooptic crystal to the two-dimensional polarimetric measurement and develop a fast imaging ellipsometer using the crystal. Ellipsometric imaging is made from intensity images measured at four-step phase modulation. The initial birefringence variance of the LiNbO<inf>3</inf>electrooptic crystal across the view field is compensated by using a calibration sample. A complete image measurement is performed in 3.5 s. An Au-sputtered glass plate and a silicon wafer deposited with a patterned aluminum film are measured to examine the functionality of this ellipsometer. The measurement results show the feasibility of the application of this system to the qualitative measurements of samples.
- 2013-03-25
著者
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TAKIZAWA Kuniharu
Faculty of Engineering, Seikei University
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Kondoh Eiichi
Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan
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Jin Lianhua
Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan
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Yagi Riyouma
Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan
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Takizawa Kuniharu
Faculty of Science and Technology, Seikei University, Musashino, Tokyo 180-8633, Japan
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