Effect of Oxygen Contents on the Properties of Al-Doped ZnO Films Prepared by Low Temperature Magnetic Controlled DC Sputtering

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概要

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• High transparency and low resistivity aluminum doped zinc oxide (AZO) films was investigated by direct current magnetic controlled sputtering with different oxygen flow rates. The resistivity obtained can be as lower than 3.7\times 10^{-4} \Omega cm which is quite good for solar cell application and flat panel display. Although the transmittance was increased, when increases in the oxygen flow during sputtering but the conductivity of the film was reduced. When increasing the oxygen flow rate at film deposition, we observed higher transmittance and red shifted in higher wavelength at the range of 400--1100 nm. The mechanism of the observations is discussed here.

• 2013-01-25

著者

• Shih Neng-fu

  Department Of Electrical Engineering Hsiuping Institute Of Technology

• Kung Chung-Yuan

  Graduate Institute of Optoelectronic Engineering, National Chung-Hsing University, Taichung 402, Taiwan, R.O.C.

• Shih Neng-Fu

  Department of Electronic Engineering, Hsiuping University of Science and Technology, Taichung 412-80, Taiwan, R.O.C.

• Lin Chiun-Chih

  Graduate Institute of Optoelectronic Engineering, National Chung-Hsing University, Taichung 402, Taiwan, R.O.C.

関連論文

• Amorphous Silicon/Silicon-Carbide Separated Absorption and Multiplication Region Avalanche Photodiode with Additional Doped Superlattice
• Design and Characteristics of Polysilicon Emitter Bipolar Junction Transistors
• Effect of Oxygen Contents on the Properties of Al-Doped ZnO Films Prepared by Low Temperature Magnetic Controlled DC Sputtering
• Optical and Magnetic Properties of Hydrothermally Synthesized Al-Doped ZnO Nanorods

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