Observation of Phenomena After Pulsed Laser Irradiation of Solid with Optical Wave Microphone
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概要
- 論文の詳細を見る
Pulsed laser irradiation of a solid has been used in plasma processing. The refractive index change of the medium is one of the important factors to understand phenomena after laser irradiation. An optical wave microphone, which is based on Fraunhofer diffraction, was applied as a novel method to detect the refractive index change of air after laser irradiation of a solid. In this paper, the theory and fundamental properties of the optical wave microphone are introduced. We report the results of optical wave microphone measurement for the refractive index change of air after pulsed laser irradiation of silicon. The effect of the energy density of the pulsed laser on the measurement was discussed.
- 2012-01-25
著者
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Ikegami Tomoaki
Graduate School Of Science And Technology And Department Of Electrical And Computer Engineering Kuma
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Mitsugi Fumiaki
Graduate School Of Science And Technology Department Of Electrical And Computer Engineering Kumamoto
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Ikegami Tomoaki
Graduate School of Science and Technology, Kumamoto University, Kumamoto 860-8555, Japan
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Nakamiya Toshiyuki
Graduate School of Industrial Engineering, Tokai University, Kumamoto 862-8652, Japan
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Sonoda Yoshito
Graduate School of Industrial Engineering, Tokai University, Kumamoto 862-8652, Japan
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Mitsugi Fumiaki
Graduate School of Science and Technology, Kumamoto University, Kumamoto 860-8555, Japan
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