NO Sensing Property of Carbon Nanotube Based Thin Film Gas Sensors Prepared by Chemical Vapor Deposition Techniques
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概要
- 論文の詳細を見る
To prepare a gas sensor that can operate at room temperature, carbon nanotubes (CNTs) were grown on Al2O3 substrates with interdigital Pt electrodes (Al2O3 substrate) by both pulsed laser deposition (PLD) and chemical vapor deposition (CVD). In this combined method, Fe catalytic thin film was prepared by PLD and then CNTs were grown on the Fe thin film by thermal CVD using an ethylene gas. The surface images of the prepared CNTs on the substrates were observed by scanning electron microscopy (SEM), and the sensitivity to NO gas was measured. The resistance of the prepared CNT-based gas sensor was found to decrease with increasing sensor temperature, and it decreased with increasing NO gas concentration at room temperature. In this paper, it is suggested that CNT gas sensors have a great possibility to be applied as innovative NO gas sensors on the basis of the experimental results.
- 2006-10-30
著者
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Bhuiyan Md.
Graduate School Of Agriculture And Biological Sciences Osaka Prefecture University
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Ebihara Kenji
Graduate School Of Science And Technology And Department Of Electrical And Computer Engineering Kuma
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Ueda Tsuyoshi
Graduate School Of Science And Technology Kumamoto University
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NORIMATSU Hideyuki
Graduate School of Science and Technology, Kumamoto University
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Ikegami Tomoaki
Graduate School Of Science And Technology And Department Of Electrical And Computer Engineering Kuma
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Bhuiyan Md.
Graduate School of Science and Technology, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan
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Ebihara Kenji
Graduate School of Science and Technology, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan
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Ueda Tsuyoshi
Graduate School of Science and Technology, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan
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Norimatsu Hideyuki
Graduate School of Science and Technology, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan
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