Improved Performances of Acoustic Energy Harvester Fabricated Using Sol/Gel Lead Zirconate Titanate Thin Film
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概要
- 論文の詳細を見る
Energy harvesters integrable on smart sensor systems have been strongly demanded. Microelectromechanical system (MEMS) acoustic energy harvesters using the first resonance vibration of a lead zirconate titanate (PZT) thin film as a diaphragm have recently been reported. Similar acoustic energy harvesters using the third resonance of a PZT diaphragm fabricated by sol/gel PZT thin film processes exhibited improved generated power density, and it was suggested that the PZT acoustic energy harvester might be suitable for use as a possible power source for silicon integrated circuits. We present further improved power generation performances of PZT MEMS acoustic energy harvesters fabricated by improved PZT capacitor fabrication processes. The PZT acoustic energy harvester with the diaphragm diameter of 1.2 mm fabricated by a sol/gel process generated an even higher energy density of 98 μW/m2 under the sound pressure level of 100 dB (0.01 W/m2) at 16.7 kHz.
- 2011-06-25
著者
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Nishioka Yasushiro
Department Of Physics Faculty Of Science University Of Tokyo
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Kimura Shu
Department of Precision Machinery, College of Science and Technology, Nihon University, Funabashi, Chiba 274-8501, Japan
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Tsujimoto Kyohei
Department of Precision Machinery, College of Science and Technology, Nihon University, Funabashi, Chiba 274-8501, Japan
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Iizumi Satoshi
Department of Precision Machinery, College of Science and Technology, Nihon University, Funabashi, Chiba 274-8501, Japan
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Sugou Tomohisa
Department of Precision Machinery, College of Science and Technology, Nihon University, Funabashi, Chiba 274-8501, Japan
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Tomioka Syungo
Department of Precision Machinery, College of Science and Technology, Nihon University, Funabashi, Chiba 274-8501, Japan
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IIZUMI Satoshi
Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
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KIMURA Shu
Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
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