Highly Uniform Fabrication of Diffraction Gratings for Distributed Feedback Laser Diodes by Nanoimprint Lithography
スポンサーリンク
概要
- 論文の詳細を見る
We have used a nanoimprint technique to fabricate diffraction gratings of distributed feedback laser diodes (DFB LDs) used in optical communication. We have aimed to establish the fabrication process featuring the high reproducibility of the period and linewidth of grating corrugations, which leads to an increase in the production yield of DFB LDs. The combination of the reverse tone nanoimprint and optimized etching techniques has contributed to the improvement of the reproducibility. The variation in grating period has been less than 0.2 nm and the variation in linewidth has been less than 10 nm over the six wafers. The results of this study indicate that our fabrication process for the diffraction gratings utilizing the nanoimprint technique has a high potential for the fabrication of DFB LDs.
- 2011-06-25
著者
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YANAGISAWA Masaki
Transmission Devices R&D Laboratories, Sumitomo Electric Industries, LTD.
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YOSHINAGA Hiroyuki
Transmission Devices R&D Laboratories, Sumitomo Electric Industries, LTD.
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Nomaguchi Toshio
Transmission Devices R&D Laboratories, Sumitomo Electric Industries, Ltd., Yokohama 244-8588, Japan
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Tsuji Yukihiro
Transmission Device Laboratory, Sumitomo Electric Industries, Ltd., 1 Taya-cho, Sakae-ku, Yokohama 244-8588, Japan
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Tsuji Yukihiro
Transmission Devices R&D Laboratories, Sumitomo Electric Industries, Ltd., Yokohama 244-8588, Japan
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Inoue Naoko
Transmission Devices R&D Laboratories, Sumitomo Electric Industries, Ltd., Yokohama 244-8588, Japan
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Yanagisawa Masaki
Transmission Devices R&D Laboratories, Sumitomo Electric Industries, Ltd., Yokohama 244-8588, Japan
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YANAGISAWA Masaki
Transmission Devices R&D Laboratories, Sumitomo Electric Industries, LTD.
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Yoshinaga Hiroyuki
Transmission Devices R&D Laboratories, Sumitomo Electric Industries, Ltd., Yokohama 244-8588, Japan
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YOSHINAGA Hiroyuki
Transmission Devices R&D Laboratories, Sumitomo Electric Industries, LTD.
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Inoue Naoko
Transmission Devices R&D Laboratories, Sumitomo Electric Industries, Ltd., Yokohama 244-8588, Japan
関連論文
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- Application of Nanoimprint Lithography to Fabrication of Distributed Feedback Laser Diodes
- Highly Uniform Fabrication of Diffraction Gratings for Distributed Feedback Laser Diodes by Nanoimprint Lithography
- Electroabsorption Effect of GaInNAs in Waveguiding Structure