Thickness-Dependent Structural and Optical Properties of VO2 Thin Films
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概要
- 論文の詳細を見る
VO2 thin films with thicknesses from 100 to 2 nm were prepared on $C$-plane sapphire (0001) substrates by magnetron sputtering and remarkable thickness-dependent structural and optical properties were found. Below 10 nm, the films are nonconductive, island structured, and their phase transition temperatures are reduced to be much lower than those of the continuous, thick films. Structural defects in the island crystal films may be one of the main reasons for this temperature reduction. The film growth mode was identified to be the Vollmer--Weber (island growth)-type in the initial stage.
- 2011-02-25
著者
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TAZAWA Masato
National Institute of Advanced Industrial Science and Technology
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TANEMURA Sakae
Department of Environmental Technology, Graduate School of Engineering, Nagoya Institute of Technolo
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Xu Gang
Key Laboratory of Renewable Energy and Gas Hydrate, Guangzhou Institute of Energy Conversion, Chinese Academy of Sciences, Guangzhou 510640, China
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Ma Jianwei
Key Laboratory of Renewable Energy and Gas Hydrate, Guangzhou Institute of Energy Conversion, Chinese Academy of Sciences, Guangzhou 510640, China
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Miao Lei
Key Laboratory of Renewable Energy and Gas Hydrate, Guangzhou Institute of Energy Conversion, Chinese Academy of Sciences, Guangzhou 510640, China
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Tanemura Sakae
Department of Environmental Technology & Urban Planning, Nagoya Institute of Technology, Gokisho-cho, Showa-ku, Nagoya 466-8555, Japan
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Tanemura Sakae
Department of Materials Science and Engineering, Japan Fine Ceramic Center, Nagoya 456-8587, Japan
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