Synthesis of Tungsten Oxide Nanoslab Bundles by Microwave Plasma-Enhanced Chemical Vapor Deposition

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概要

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• A large quantity of tungsten oxide nanoslabs was synthesized within 4 min by microwave plasma-enhanced chemical vapor deposition (MPECVD). The structural, geometrical, and chemical compositions of these nanoslabs were characterized by X-ray diffraction (XRD), transmission electron microscopy (TEM), energy-dispersive X-ray spectroscopy (EDS), and Raman spectroscopy. The results of these characterizations confirmed that the nanoslabs with [010] as the major growth direction have a W18O49 structure with thicknesses of 30--50 nm, widths of up to 300--500 nm, and, lengths of up to 800--2000 nm. In XRD spectra, the reflection peaks are representative of monoclinic W18O49. A vapor--solid (VS) mechanism was confirmed for this growth process because no catalyst was used in this growth process.

• 2011-01-25

著者

• Shih Han

  Department Of Material Science And Engineering National Tsing-hua University

• Hsieh Yun

  Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan 300, R.O.C.

• Huang Meng

  Department of Materials Science and Engineering, National Chung Hsing University, Taichung, Taiwan 402, R.O.C.

• Chen Uei

  Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan 300, R.O.C.

• Hsueh Sen

  Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan 300, R.O.C.

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• Synthesis of Tungsten Oxide Nanoslab Bundles by Microwave Plasma-Enhanced Chemical Vapor Deposition
• Structure and Electrical Studies of Fluorinated Amorphous Carbon Films Prepared by Electron Cyclotron Resonance/Chemical-Vapor Deposition
• Characterization and Cathodoluminescence of Beak-Like SnO2 Nanorods
• Selected-Area Growth of SnO2 Nanowires on TiO2 Layer through Reduction of Hydrogen Gas

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