Effects of Surface Coating on Cylinder Rods Prepared Using Sputtering Deposition Method with Modulated Magnetic Field
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概要
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Tungsten (W), carbon (C), and titanium (Ti) thin films were prepared on carbide steel cylinder rods using a new magnetron sputtering deposition method to prevent their corrosion or increase their friction resistance. In this method, plasma was generated between the cylinder rod anode substrate and the cylinder pipe targets, and it moved toward the axial direction with the generation of a modulated magnetic field by a low-frequency alternating coil current. Experimental results showed that the surface morphology of the film became smooth, and the surface roughness of the film decreased. Deposition rate and film uniformity increased with the use of a modulated magnetic field, and friction coefficient increased as a result of the film preparation used.
- 2010-08-25
著者
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SUDA Yoshiaki
Sasebo National College of Technology
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KAWASAKI Hiroharu
Sasebo National College of Technology
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OHSHIMA Tamiko
Sasebo National College of Technology
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Suda Yoshiaki
Sasebo National College of Technology, 1-1 Okishin, Sasebo, Nagasaki 857-1193, Japan
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Kawasaki Hiroharu
Sasebo National College of Technology, 1-1 Okishin, Sasebo, Nagasaki 857-1193, Japan
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Shibahara Katsuki
Sasebo National College of Technology, 1-1 Okishin, Sasebo, Nagasaki 857-1193, Japan
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Yagyu Yoshihito
Sasebo National College of Technology, 1-1 Okishin, Sasebo, Nagasaki 857-1193, Japan
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Ohshima Tamiko
Sasebo National College of Technology, 1-1 Okishin, Sasebo, Nagasaki 857-1193, Japan
関連論文
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- Optical Emission Spectroscopy of Low-Discharge-Power Magnetron Sputtering Plasmas Using Pure Tungsten Target
- Effects of Surface Coating on Cylinder Rods Prepared Using Sputtering Deposition Method with Modulated Magnetic Field
- Plasma Processing of Functional Thin Films by Sputtering Deposition Using Metal-Based Powder Target
- Plasma Processing of Functional Thin Films by Sputtering Deposition Using Metal-Based Powder Target (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials)