Preparation of Antireflection SiO2 Structures Based on Nanoimprinting Using Anodic Porous Alumina Molds
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概要
- 論文の詳細を見る
SiO2 pillar arrays with high aspect ratios were fabricated by nanoimprinting using ordered anodic porous alumina as a mold. The size and shape of SiO2 pillars could be controlled by changing the geometrical structures of the anodic porous alumina mold. The used of the obtained SiO2 fine patterns composed of ordered arrays of tapered pillars could effectively suppress the reflectance of incident light at the surface of the sample.
- 2010-06-25
著者
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Nishio Kazuyuki
Department Of Applied Chemistry Faculty Of Engineering Tokyo Metropolitan University
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Yanagishita Takashi
Department Of Applied Chemistry Tokyo Metropolitan University
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Endo Takahide
Department Of Mechanical Engineering The University Of Tokyo:(present Address)computer And Informati
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Takashi Yanagishita
Department of Applied Chemistry, School of Engineering, Tokyo Metropolitan University, 1-1 Minamiosawa, Hachioji, Tokyo 192-0397, Japan
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Hideki Masuda
Department of Applied Chemistry, School of Engineering, Tokyo Metropolitan University, 1-1 Minamiosawa, Hachioji, Tokyo 192-0397, Japan
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