Transmission Electron Beam Drilling for Nanoscale Fabrication

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概要

• 論文の詳細を見る

• We demonstrated that a high-resolution focused electron beam can be used to fabricate metal nanostructures and devices on insulating membranes by nanosculpting metal films. This top-down focused electron beam drilling method works by the controlled ablation of materias to produce nanoscale devices with near-atomic the precision. In addition, we have fabricated a single-electron transistor (SET) on free-standing transparent Si3N4 membranes, which permits enables us to explore quantum tunneling effects in narrow-constriction structures. The produced SET exhibited distinct Coulomb-blockade current–voltage characteristics and gate-modulated current at 4.2 K. Its high resolution, geometrical flexibility, and yield make this fabrication method attractive for many applications including nanoelectronics and quantum devices.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2010-06-25

著者

• Lai Yu-cheng

  Department Of Chemistry And Center For Nano Technology Chung Yuan Christian University

• Dau-Chung Wang

  Department of Mechanical Engineering, National Yunlin University of Science and Technology, Yunlin 640, Taiwan

• Lin Tsan-Chu

  Graduate School of Engineering Science and Technology, Doctoral Program, National Yunlin University of Science and Technology, Yunlin 640, Taiwan

• Su Rui-Zhi

  Department of Physics, National Changhua University of Education, Changhua 500, Taiwan

• Cen-Shawn Wu

  Department of Physics, National Changhua University of Education, Changhua 500, Taiwan

• Rui-Zhi Su

  Department of Physics, National Changhua University of Education, Changhua 500, Taiwan

• Tsan-Chu Lin

  Graduate School of Engineering Science and Technology, Doctoral Program, National Yunlin University of Science and Technology, Yunlin 640, Taiwan

• Yu-cheng Lai

  Department of Physics, National Changhua University of Education, Changhua 500, Taiwan

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• Transmission Electron Beam Drilling for Nanoscale Fabrication

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