Mechanical Characteristics of Nanosprings Fabricated by Focused-Ion-Beam Chemical Vapor Deposition Using Ferrocene Source Gas

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概要

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• The mechanical characteristics of iron-containing nanosprings (Fe-containing nanosprings) fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD) using a ferrocene (C10H10Fe) source gas were investigated. The shear and Young’s moduli were 34 and 92 GPa, respectively. We also evaluated the annealing effect of Fe-containing nanosprings and observed a droplet containing Fe and Ga on the nanospring after annealing at 600 °C. The spring constant rapidly decreased after annealing at 600 °C. By scanning electron microscopy energy–dispersive X-ray spectroscopy (SEM–EDX) and transmission electron microscopy energy–dispersive X-ray spectroscopy (TEM–EDX) line analysis, it was confirmed that the decrease in the spring constant was due to Ga removal.

• 2010-06-25

著者

• Yuichi Haruyama

  University of Hyogo, 3-1-2 Koto, Kamigori, Hyogo 678-1205, Japan

• Shinji Matsui

  University of Hyogo, Kamigori, Hyogo 678-1205, Japan

• Okada Makoto

  University of Hyogo, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori, Hyogo 678-1205, Japan

• Kang Yuji

  University of Hyogo, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori, Hyogo 678-1205, Japan

• Kazuhiro Kanda

  University of Hyogo, 3-1-2 Koto, Kamigori, Hyogo 678-1205, Japan

• Nakai Yasuki

  University of Hyogo, 3-1-2 Koto, Kamigori, Hyogo 678-1205, Japan

• Tetsuya Ichihashi

  Nano Electronics Research Laboratories, NEC Corporation, 34 Miyukigaoka, Tsukuba, Ibaraki 305-8051, Japan

• Yuji Kang

  University of Hyogo, 3-1-2 Koto, Kamigori, Hyogo 678-1205, Japan

• Yasuki Nakai

  University of Hyogo, 3-1-2 Koto, Kamigori, Hyogo 678-1205, Japan

関連論文

• Deposition Yield and Physical Properties of Carbon Films Deposited by Focused-Ion-Beam Chemical Vapor Deposition
• Direct Patterning on Sol–Gel Low-$k$ Porous Silica by Thermal Nanoimprinting
• Mechanical Characteristics of Nanosprings Fabricated by Focused-Ion-Beam Chemical Vapor Deposition Using Ferrocene Source Gas

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