Thin Film Transistors with Ink-Jet Printed Amorphous Oxide Semiconductors

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概要

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• We investigated the influence of the thickness of printed Ga–In–Zn-O (GIZO) channel on transistor performance. Semiconductor layers were ink-jet printed using sol–gel derived GIZO solution and the thickness of the resulting active layers varied depending on the pre-heated substrate temperature. We found that GIZO film thickness significantly influences device performance. Thin film transistors (TFTs) with thicker active layers showed higher on-current/off-current mobility and a threshold voltage shift in the negative direction. The dependence of the electric characteristics on thickness resulted from the increased intrinsic free charge carriers as the active layer thickness increased. Ink-jet printing conditions need to be carefully controlled to maximize device performance.

• 2010-05-25

著者

• KOO Chang

  Department of Materials Science and Engineering, Yeungnam University

• Jeong Youngmin

  Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea

• Dongjo Kim

  Department of Materials Science and Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-gu, Seoul 120-749, Korea

• Jooho Moon

  Department of Materials Science and Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-gu, Seoul 120-749, Korea

• Kim Dongjo

  Department of Materials Science and Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-gu, Seoul 120-749, Korea

• Keunkyu Song

  Department of Materials Science and Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-gu, Seoul 120-749, Korea

• Youngmin Jeong

  Department of Materials Science and Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-gu, Seoul 120-749, Korea

関連論文

• Thin Film Transistors with Ink-Jet Printed Amorphous Oxide Semiconductors
• Low-Temperature Solution-Deposited Oxide Thin-Film Transistors Based on Solution-Processed Organic–Inorganic Hybrid Dielectrics
• Ferroelectric Sr_2(Nb, Ta)_2O_7 Thin Films Prepared by Chemical Solution Deposition

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