Formation of Periodic Microbump Arrays by Metal-Assisted Photodissolution of InP
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概要
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The metal-assisted chemical etching of an InP substrate combined with UV irradiation was investigated. Microbump arrays with ordered intervals were fabricated by the site-selective photodissolution of an InP substrate using patterned noble-metal films as catalysts. The etching rate of the InP substrate using noble-metal catalysts was drastically accelerated by UV irradiation. The etching speed of the present “metal-assisted photodissolution” increased in the order of Au $<$ Pd $<$ Pt, corresponding to the order of the magnitude of the work function of each metal used in this study.
- 2010-04-25
著者
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Yokoyama Takayuki
Department Of Cardiology Juntendo University School Of Medicine
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Ono Sachiko
Department Of Applied Chemistry Faculty Of Engineering Kogakuin University
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Asoh Hidetaka
Department Of Applied Chemistry Kogakuin University
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Takayuki Yokoyama
Department of Applied Chemistry, Faculty of Engineering, Kogakuin University, 2665-1 Nakano, Hachioji, Tokyo 192-0015, Japan
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