Complementary Metal–Oxide–Semiconductor Micro-Electro-Mechanical-System Reconfigurable Cantilever Resonator with Multiple Electrostatic Electrodes

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概要

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• In this paper, we present a prestress vertical comb drive resonator with a frequency tuning capability. The resonator consists of three sets of comb fingers, which act as driving electrodes. The comb fingers are fabricated along with a composite beam. One end of the composite beam is clamped to the anchor, whereas the other end is elevated vertically by the residual stress. A clamped force, which is formed by a DC voltage, is utilized to restrain the vibration of the composite beam. By applying a DC clamped voltage and a driving voltage in different electrodes, the resonator exhibits different frequency responses. The device is fabricated through a 0.35 μm complementary metal–oxide–semiconductor (CMOS) process with a post-CMOS micromachining process. Experimental results indicate that the initial resonant frequency of the device is 18.6 kHz, and the maximum frequency tuning range up to 28.5% is obtained. The resonator device can recover its original frequency without causing any structural damage.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2010-11-25

著者

• Chiou Jin-Chern

  Institute of Electrical Control Engineering, National Chiao Tung University, 1001 University Road, EE772, Hsinchu 300, Taiwan, Republic of China

• Chiou Jin-Chern

  Institute of Electrical Control Engineering, National Chiao Tung University, Hsinchu 30010, Taiwan, R.O.C.

• Shieh Li-Jung

  Institute of Electrical Control Engineering, National Chiao Tung University, Hsinchu 30010, Taiwan, R.O.C.

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• Complementary Metal–Oxide–Semiconductor Micro-Electro-Mechanical-System Reconfigurable Cantilever Resonator with Multiple Electrostatic Electrodes

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