1 Tbit/in.2 Very-High-Density Recording in Mass-Productive Polycrystalline Ferroelectric Thin Film Media

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概要

• 論文の詳細を見る

• We demonstrate very-high-density ferroelectric recording experiments of 1 Tbit/in.2 in polycrystalline Pb(Zr,Ti)O3 (PZT) thin film for the first time. A high-quality polycrystalline PZT thin film was successfully deposited on a silicon substrate with a SrRuO3 (SRO) electrode by metal–organic chemical vapor deposition (MOCVD). The roughness of the PZT film was reduced to less than 1 nm by chemical mechanical polishing (CMP). The PZT film has very high controllability for domain inversion. Our fabrication process also enables high productivity. Therefore, our PZT film has potential to be a mass-productive ferroelectric recording medium for high-density storage systems.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2009-07-25

著者

• Toda Masayuki

  Wacom R&d Corporation

• Onoe Atsushi

  R&D Laboratories, Pioneer Corporation, 6-1-1 Fujimi, Tsurugashima, Saitama 350-2288, Japan

• Tamura Masahiro

  AMAYA Corporation, 3149-1 Nishikata, Koshigaya, Saitama 343-0822, Japan

• Fujimoto Kenjiro

  R&D Laboratories, Pioneer Corporation, 6-1-2 Fujimi, Tsurugashima, Saitama 350-2288, Japan

• Kawano Takahiro

  R&D Laboratories, Pioneer Corporation, 6-1-2 Fujimi, Tsurugashima, Saitama 350-2288, Japan

• Umeda Masaru

  WACOM R&D Corporation, 568 Tanaka, Fukaya, Saitama 369-1108, Japan

• Kawano Takahiro

  R&D Laboratories, Pioneer Corporation, 6-1-2 Fujimi, Tsurugashima, Saitama 350-2288, Japan

• Umeda Masaru

  WACOM R&D Corporation, 568 Tanaka, Fukaya, Saitama 369-1108, Japan

関連論文

• Improvement of solid solution and dielectric properties of (Ba,Sr)(Ti,Ce)O_3 ceramics by slight La doping
• Point Defect Characteristics of High-$k$ Double Rare-Earth-Doped BaTiO3 Ceramics with Diffuse Phase Transition by Electron Spin Resonance
• Ultrahigh-Density Ferroelectric Data Storage Using Scanning Nonlinear Dielectric Microscopy
• 1 Tbit/in.2 Very-High-Density Recording in Mass-Productive Polycrystalline Ferroelectric Thin Film Media
• Very High-Density Ferroelectric Digital Data Storage Using Tracking and Error Correction Technique

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