Nanohole Arrays Fabricated on Gold Surfaces by Total Wet Nanopatterning through Block Copolymer Masks

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概要

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• Well-ordered nanohole arrays on atomically flat gold (111) surfaces were fabricated by wet etching through block copolymer (BC) masks using ferri/ferrocyanide etchant. Amphiphilic BCs consisting of poly(ethylene oxide) (PEO) and liquid crystalline poly(methacrylate) with azobenzene mesogens [PMA(Az)], PEOm-b-PMA(Az)n, blended with poly(ethylene glycol) monomethylether (EO) form hexagonally arranged ion-transporting nanocylinders of EO-blended PEO microdomains in the BC masks. Atomic force microscopy (AFM) revealed a hexagonally arranged nanohole array on each terrace of the gold surface after the total wet nanopattering including a 5 min etching. The diameter ($d$) and distance between neighboring nanoholes ($D$) were controlled by the degree of polymerization of the BC. Two kinds of nanohole arrays with $(d, D) = (12\,\text{nm}, 25\,\text{nm})$ and (20 nm, 41 nm) were obtained in good agreement with the $d$ and $D$ of the EO-blended PEO microdomains of the masks. Scanning tunneling microscopy (STM) indicated that the depth of nanoholes was 3.5 Å, corresponding to the thickness of a single atomic layer of gold, and the flatness of the bottom of the holes was confirmed.

• 2009-06-25

著者

• ITO Kaori

  Division for Animal Resources and Development, Life Science Research Center, University of Toyama

• Iyoda Tomokazu

  Division Of Integrated Molecular Engineering Chemical Resources Laboratory Tokyo Institute Of Technology

• Watanabe Ryoko

  Division of Integrated Molecular Engineering, Chemical Resources Laboratory, Tokyo Institute of Technology, Yokohama 226-8503, Japan

• Sakaguchi Hiroshi

  Graduate School of Science and Engineering, Ehime University, Matsuyama 790-8577, Japan

• Ito Kaori

  Division of Integrated Molecular Engineering, Chemical Resources Laboratory, Tokyo Institute of Technology, Yokohama 226-8503, Japan

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