High-Speed Mechanical Actuator for Precision Optical Path Length Control
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概要
- 論文の詳細を見る
We have developed a high-speed mechanical actuator that can be used for optical systems requiring wide-band feedback control. To attain the wide-band control, we have fabricated a moving-magnet-type electromagnetic actuator with a simple structure. Using this actuator, we achieved a control system for a Michelson interferometer with a servo bandwidth defined by the unity gain frequency of the control loop as large as 30 kHz. We have also measured the amount of wobble motion of the actuator and its long-term stability. Here, we report the characteristics of the actuator.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-01-25
著者
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Moriwaki Shigenori
Department Of Advanced Material Science The University Of Tokyo
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Mio Norikatsu
Department Of Advanced Material Science The University Of Tokyo
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Machida Kosuke
Department of Advanced Materials Science, University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan
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Mio Norikatsu
Department of Advanced Materials Science, University of Tokyo, Kashiwa, Chiba 277-8561, Japan
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Machida Kosuke
Department of Advanced Materials Science, University of Tokyo, Kashiwa, Chiba 277-8561, Japan
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Moriwaki Shigenori
Department of Advanced Materials Science, University of Tokyo, Kashiwa, Chiba 277-8561, Japan
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