Nanopore Size Estimation by Electrochemical Impedance Spectroscopy Analysis

スポンサーリンク

概要

• 論文の詳細を見る

• We present a simple and cost-effective approach by electrochemical impedance spectroscopy (EIS) for the accurate pore size estimation of silicon based nanopores. This method takes into account the capacitor effects of the electrical double layer and the resistor effects of the ion concentration inside the nanochannel. The nanopore impedance was modeled as the electrolyte resistance $R_{\text{s}}$ in series with a parallel ion diffusion circuit charge transfer resistance $R_{\text{f}}$ with a constant phase element (CPE) that models the behavior of the double layer. EIS analysis, which has been widely employed to measure the energy storage and dissipation properties of physico-chemical systems in a frequency domain, was adopted to obtain the impedance parameters of the nanopores. The nanopore size was then estimated from the impedance parameters. The accuracy of the estimated nanopore size was verified using an transmission electron microscope (TEM) image.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2008-09-25

著者

• Yu Ming-chang

  Department Of Electrical Engineering Southern Taiwan University Of Technology

• Wang Gou-jen

  Department Of Mechanical Engineering National Chung-hsing University

• Yu Ming-Chang

  Department of Mechanical Engineering, National Chung-Hsing University, Taichung 402, Taiwan

• Chien Ming-Chun

  Department of Mechanical Engineering, National Chung-Hsing University, Taichung 402, Taiwan

• Wang Gou-Jen

  Department of Mechanical Engineering, National Chung-Hsing University, Taichung 402, Taiwan

関連論文

• Intelligent 3D CAD Data Extraction System
• Fabrication and Modeling of the Gray-Scale Mask Based Aspheric Refraction Microlens Array
• Stress Effect on Aluminum-Induced Crystallization of Sputtered Amorphous Silicon Thin Films
• Fabrication of Crystalline Indium Tin Oxide Nanobasket Electrodes using Aluminum Anodic Oxide Template
• Modeling Ion Diffusion Current in Nanochannel Using Infinitesimal Distribution Resistor–Capacitor Circuits
• New Optimization Strategy for Chemical Mechanical Polishing Process
• Nanopore Size Estimation by Electrochemical Impedance Spectroscopy Analysis

スポンサーリンク