Fabrication and Modeling of the Gray-Scale Mask Based Aspheric Refraction Microlens Array

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概要

• 論文の詳細を見る

• In this research, the manufacturing processes of aspherical refraction microlens array by gray-scale mask if investigated. In the first part of this research, we emphasize on the gray-scale mask based microlens array fabrication processes through the UV-LIGA approach. Furthermore, a two-stage process-modeling scheme is proposed to reduce the time-consuming trail-and-error parameters tuning labor works. Experimental results demonstrate that the proposed approach can well model the fabrication process and is capable of providing effective fabrication parameters once the diameter and height of a certain microlens is provided.

• 一般社団法人日本機械学会の論文
• 2003-12-15

著者

• Wang Shuh-yi

  Department Of Mechanical Engineering Cheng-shiu Insitute Of Technology

• Wang Gou-jen

  Department Of Mechanical Engineering National Chung-hsing University

• Chin Chi-hsian

  Graduate Student Institute Of Precision Engineering National Chung-hsing University

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