Reliable Characterization of Microcrystalline Silicon Films for Thin Film Transistor Applications
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概要
- 論文の詳細を見る
Despite many years of research on microcrystalline silicon films, these materials have not yet found industrial application as thin film transistors. We discuss difficulties in their accurate characterization and compare the advantages and disadvantages of commonly used characterization techniques. Our results show that no single technique provides a complete characterization of these films, and that a combination of techniques is required for a detailed and reliable picture of the film microstructure. Nevertheless, in the case of optimized films, most of the information on the film microstructure can be derived from spectroscopic ellipsometry alone.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-09-25
著者
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Roca I
Laboratoire De Physique Des Interfaces Et Des Couches Minces Umr 7647 Cnrs Ecole Polytechnique
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Chen Hong
Liquid Crystal Display Research and Design Center (SEC LCD), Samsung Electronics, San #24, Nongseo-ri, Giehung-eup, Yongin, Gyeonggi-do 449711, Korea
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Abramov Alexey
Laboratoire de Physique des Interfaces et des Couche Minces (LPICM), Ecole Polytechnique, Palaiseau 91128, France
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Girotra Kunal
Liquid Crystal Display Research and Design Center (SEC LCD), Samsung Electronics, San #24, Nongseo-ri, Giehung-eup, Yongin, Gyeonggi-do 449711, Korea
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Park Seungkyu
Liquid Crystal Display Research and Design Center (SEC LCD), Samsung Electronics, San #24, Nongseo-ri, Giehung-eup, Yongin, Gyeonggi-do 449711, Korea
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Park Kyongtae
Liquid Crystal Display Research and Design Center (SEC LCD), Samsung Electronics, San #24, Nongseo-ri, Giehung-eup, Yongin, Gyeonggi-do 449711, Korea
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Huh Jong-moo
Liquid Crystal Display Research and Design Center (SEC LCD), Samsung Electronics, San #24, Nongseo-ri, Giehung-eup, Yongin, Gyeonggi-do 449711, Korea
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Choi Joonhoo
Liquid Crystal Display Research and Design Center (SEC LCD), Samsung Electronics, San #24, Nongseo-ri, Giehung-eup, Yongin, Gyeonggi-do 449711, Korea
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Kim Chiwoo
Liquid Crystal Display Research and Design Center (SEC LCD), Samsung Electronics, San #24, Nongseo-ri, Giehung-eup, Yongin, Gyeonggi-do 449711, Korea
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Souk Jun
Liquid Crystal Display Research and Design Center (SEC LCD), Samsung Electronics, San #24, Nongseo-ri, Giehung-eup, Yongin, Gyeonggi-do 449711, Korea
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Roca i
Laboratoire de Physique des Interfaces et des Couche Minces (LPICM), Ecole Polytechnique, Palaiseau 91128, France
関連論文
- Large Area Deposition of Polymorphous Silicon by Plasma Enhanced Chemical Vapor Deposition at 27.12MHz and 13.56MHz
- Reliable Characterization of Microcrystalline Silicon Films for Thin Film Transistor Applications
- Large Area Deposition of Polymorphous Silicon by Plasma Enhanced Chemical Vapor Deposition at 27.12 MHz and 13.56 MHz