Basic Study on Proximity Sensors Utilizing Air-Film Damping Effect Caused by Longitudinal-Mode Piezoelectric Vibrator
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概要
- 論文の詳細を見る
Proximity sensing through the air-film damping effect caused by a longitudinal-mode vibrator is studied. Lateral flow of viscous fluid sandwiched between a test object and a vibrating (sensing) plate is subjected to resistive force. Therefore, it acts as a damper for the motion of vibration. Because the sensing plate is vibrated in its normal direction by a longitudinal-mode piezoelectric vibrator, electric properties of the vibrator vary depending on the vibrator-to-object distance. It is shown that the $Q$-value of the vibrator decreases from 8,000 to 1,000 in the range where the plate-to-objective distance is less than 0.5 mm.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2008-05-25
著者
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NAGASAWA Tatsuya
Department of Development Research, Kissei Pharmaceutical Co. Ltd.
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Yamada Ken
Department Of Applied Chemistry Faculty Of Science And Technology Keio University
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Nagasawa Tatsuya
Department of Electronic Engineering, Tohoku Gakuin University, Tagajo, Miyagi 985-8537, Japan
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Kaneko Shou
Department of Electrical Communications, Tohoku University, Sendai 980-8579, Japan
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- Basic Study on Proximity Sensors Utilizing Air-Film Damping Effect Caused by Longitudinal-Mode Piezoelectric Vibrator