Pneumatic-Controlled Fluidic Microdevices for Executing NOT, NOR, and NAND Logic Functions
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概要
- 論文の詳細を見る
Novel pneumatic-controlled logic microdevices based on a microelectromechanical system (MEMS) compatible process and microfluidic control technology have been developed for executing the universal basic logic functions of NOT, NOR, and NAND. The main fabrication processes for the logic microdevices include anisotropic silicon bulk etching, silicone rubber membrane formation, wafer bonding and packaging. The dynamic characteristics and pneumatic-controlled performance of the elastic membranes have been measured using an equipped fluidic instrument, which indicates their potential application to safety monitoring for preventing electric-induced disasters. All logic functions of the microdevices have been demonstrated to correspond exactly to the related truth tables. The newly developed logic microdevices are capable of controlling a liquid or gas system with high sensitivity in a wide dynamic range, and with strong immunity from temperature fluctuations.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-03-25
著者
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Lai Chi-Chih
Department of Automatic Control Engineering, Feng Chia University, 100, Wenhwa Road, Seatwen, Taichuang 40724, Taiwan, R.O.C.
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Chang Hsing-Cheng
Department of Automatic Control Engineering, Feng Chia University, 100, Wenhwa Road, Seatwen, Taichuang 40724, Taiwan, R.O.C.
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Tsou Chingfu
Department of Automatic Control Engineering, Feng Chia University, 100, Wenhwa Road, Seatwen, Taichuang 40724, Taiwan, R.O.C.
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Huang Ming-Che
Department of Automatic Control Engineering, Feng Chia University, 100, Wenhwa Road, Seatwen, Taichuang 40724, Taiwan, R.O.C.
関連論文
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- Pneumatic-Controlled Fluidic Microdevices for Executing NOT, NOR, and NAND Logic Functions
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