A Study on Removal of Shoulders at Laser Ablated Indium Tin Oxide Film Edge

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概要

• 論文の詳細を見る

• A diode-pumped Q-switched Nd:YVO4 laser ($\lambda=1064$ nm) was used for the fabrication of plasma display panel (PDP) bus electrodes. In the experiments, with the maskless laser direct patterning of indium tin oxide (ITO) films, the laser-ablated ITO patterns showed the formation of shoulders at the edge of the ITO lines and a ripplelike structure with the etched bottom compared with the chemically wet-etched ITO patterns. Using a Q-switched Nd:YVO4 laser and a galvanometric scanning system, 500 mm/s with a 40 kHz repetition rate was found to be appropriate for application to PDP manufacturing. By dipping the laser-ablated ITO films in the chemical etching solution for 30 s at 50 °C, the shoulders were effectively removed without affecting the discharging properties of ac-PDP.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2008-01-25

著者

• Kim Kwang

  College Of Agriculture And Life Sciences Seoul National University

• Kim Kwang

  College of Electronics and Electrical Engineering, Kyungwon University, San 65, Bokjung-dong, Soojung-gu, Seongnam, Kyunggi 461-701, Korea

• Kwon Sang

  College of Electronics and Electrical Engineering, Kyungwon University, San 65, Bokjung-dong, Soojung-gu, Seongnam, Kyunggi-do 461-701, Korea

• Tak Tae

  Division of Mechanical and Mechatronics, Kangwon National University, 192-1 Hyoja 2 dong, Chuncheon, Kangwon-do 200-701, Korea

• Tak Tae

  Division of Mechanical and Mechatronics, Kangwon National University, 192-1 Hyoja 2 dong, Chuncheon, Kangwon 200-701, Korea

• Kwon Sang

  College of Electronics and Electrical Engineering, Kyungwon University, San 65, Bokjung-dong, Soojung-gu, Seongnam, Kyunggi 461-701, Korea

• Kwon Sang

  College of Electronics and Electrical Engineering, Kyungwon University, San 65, Bokjung-dong, Soojung-gu, Seongnam City, Kyunggi-do 461-701, Korea

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• Material Properties and Plasma Display Panel Discharging Characteristics Depending on MgO Evaporation Rate
• Laser Direct Patterning of Indium Tin Oxide Layer for Plasma Display Panel Bus Electrode
• A Study on Removal of Shoulders at Laser Ablated Indium Tin Oxide Film Edge

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