Micropatterning of Electrodes by Microcontact Printing Method and Application to Thin Film Transistor Devices
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概要
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Electrode micropatterning without etching was successfully achieved by the microcontact printing (μCP) method. We used a conductive polymer poly(3,4-ethylenedioxythiophene)/poly(4-stylenesulfonate) (PEDOT/PSS) as an electrode material. We controlled the surface free energy of poly(dimethylsiloxane) (PDMS) by exposure to vacuum ultraviolet (VUV) light with a wavelength of 172 nm using an excimer lamp. Consequently, we established an inking technique for PEDOT/PSS aqueous dispersion on a PDMS elastomer stamp. The micropatterns of PEDOT/PSS thin films of 1 μm width were fabricated by transferring the PEDOT/PSS aqueous dispersion on the PDMS elastomer stamp to another substrate by the μCP method. Furthermore, we fabricated top contact (TC) organic thin film transistors (OTFTs) with PEDOT/PSS as source and drain electrodes. We demonstrated the successful operation of the fabricated OTFTs with a channel length of 5 μm and an electrode width of 8 μm. Results show that the μCP method is promising for application to various devices that require micropatterning.
- 2007-09-15
著者
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Yase Kiyoshi
Photonics Research Institute National Institute Of Advanced Industrial Science And Technology (aist)
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Ikawa Mitsuhiro
Photonics Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8565, Japan
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Fujita Mariko
Photonics Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8565, Japan
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Takakuwa Atsushi
Advanced Device Research and Development Department, SEIKO EPSON Corporation, Fujimi, Nagano 399-0293, Japan
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