Optical Properties and Crystallinity of ZnO Films for Application in Super-Resolution Optical Discs
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概要
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An energy-gap-induced super resolution (EG-SR) in optical discs was obtained using ZnO thin films deposited by sputtering. The properties of EG-SR optical discs were found to depend on the conditions of ZnO deposition. To clarify the reason for this, we prepared ZnO thin films under different sputtering conditions and studied their properties by X-ray diffraction, X-ray photoelectron spectroscopy, and UV–visible-light (vis) spectroscopy. Results indicated that oxygen vacancies in the ZnO thin films affect the readout sensitivity of the EG-SR optical discs.
- 2007-05-15
著者
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Matsumura Michio
Research Center For Photoenergetics Of Organic Materials Osaka University
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Takamori Nobuyuki
Corporate Research and Development Group, SHARP Corporation, 2613-1 Ichinomoto, Tenri, Nara 632-8567, Japan
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Tsujino Kazuya
Research Center for Solar Energy Chemistry, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531, Japan
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