Optical Characterization of Titanium–Vanadium Oxide Films

概要

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Composite thin films of titanium and vanadium oxides (TVO) with various compositions were deposited by rf magnetron sputtering. The TVO films, of which their crystalline structure, composition, and film morphology were characterized, were examined to determine the optical constants and thermochromic performance as a function of the compositional ratio. The optical constants were determined by ellipsometric analysis using a consistent model of the film structure, and it was found that optical constants at visible and near-infrared wavelengths monotonically decrease from the values of VO2 towards those of TiO2 with an increase in Ti content in the TVO. The gradual depression of thermochromic performance with an increase in Ti content was measured. The change in X-ray diffraction pattern with the compositional ratio suggests that VO2 and TiO2 in the TVO film form a solid solution, or in other words the TVO can be expressed by TixV1-xO2.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2007-02-15