Experimental Mechanical Stress Characterization of Micro-Electro-Mechanical-Systems Device Using Confocal Laser Scanning Microscope Combined with Raman Spectrometer System

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概要

• 論文の詳細を見る

• We developed a confocal laser scanning microscopy (CLSM) system combined with a Raman spectrometer system. The potential of this system for characterizing micro-electro-mechanical-system (MEMS) devices was demonstrated by analyzing a Si membrane of a pressure sensor device. A deflection profile and a Raman frequency shift were simultaneously measured. The relationship between the mechanical stress and the deflection of the Si membrane was clearly observed. The mechanical stresses obtained by Raman measurements and deflection measurements were in good agreement.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2007-10-15

著者

• Erikawa Wataru

  Lasertec Corporation, 4-10-4 Tsunashimahigashi, Kohoku-ku, Yokohama 223-8551, Japan

• Yamaguchi Makoto

  Technical Research Institute, Japan Society for the Promotion of Machine Industry, 1-1-12 Hachiman-cho, Higashikurume, Tokyo 203-0042, Japan

• Ueno Shigeru

  Technical Research Institute, Japan Society for the Promotion of Machine Industry, 1-1-12 Hachiman-cho, Higashikurume, Tokyo 203-0042, Japan

• Miura Ichiro

  Renishaw K.K., 4-29-8 Yotsuya, Shinjuku-ku, Tokyo 160-0040, Japan

関連論文

• Experimental Mechanical Stress Characterization of Micro-Electro-Mechanical-Systems Device Using Confocal Laser Scanning Microscope Combined with Raman Spectrometer System

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