Erikawa Wataru | Lasertec Corporation, 4-10-4 Tsunashimahigashi, Kohoku-ku, Yokohama 223-8551, Japan

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概要

関連著者

Erikawa Wataru
Lasertec Corporation, 4-10-4 Tsunashimahigashi, Kohoku-ku, Yokohama 223-8551, Japan
Yamaguchi Makoto
Technical Research Institute, Japan Society for the Promotion of Machine Industry, 1-1-12 Hachiman-cho, Higashikurume, Tokyo 203-0042, Japan
Ueno Shigeru
Technical Research Institute, Japan Society for the Promotion of Machine Industry, 1-1-12 Hachiman-cho, Higashikurume, Tokyo 203-0042, Japan
Miura Ichiro
Renishaw K.K., 4-29-8 Yotsuya, Shinjuku-ku, Tokyo 160-0040, Japan

著作論文

Experimental Mechanical Stress Characterization of Micro-Electro-Mechanical-Systems Device Using Confocal Laser Scanning Microscope Combined with Raman Spectrometer System

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