Detection Limit for Defect Density by Light Scattering Tomography

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概要

• 論文の詳細を見る

• We obtained simulation images by light scattering tomography at various bulk-microdefect densities, and studied the effect of parameters on the detection limit in light scattering tomography measurements. We found that the detection limit is mainly attributable to the numerical aperture of the objective lens, incident beam width and threshold level, and for standard light scattering tomography equipment, the detection limit is about $10^{11}$ cm-3.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-09-15

著者

• Sakai Kazufumi

  National Defense Academy Department Of Mathematics And Physics

• Sakai Kazufumi

  National Institute of Advanced Industrial Science and Technology (AIST) Kyushu, 807-1 Shuku-machi, Tosu, Saga 841-0052, Japan

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• Detection Limit for Defect Density by Light Scattering Tomography

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