Influence of Exposure Spectra on Optical Properties of Alicyclic Methacrylate Copolymer Waveguides Fabricated by Deep UV Exposure

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概要

• 論文の詳細を見る

• We have investigated the fabrication of waveguides from alicyclic methacrylate copolymer based on refractive index modification by deep UV exposure. To control and optimize the properties of the UV-induced process, the influence of exposure spectra on mode spectra and near-field patterns was studied. Depending on the exposure condition, a single-mode propagation could be achieved at 1550 nm. The waveguide loss was 1.5 dB/cm at 1550 nm. As a first basic waveguide device, we fabricated a symmetrical $1\times 2$ splitter.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-08-30

著者

• Henzi Patric

  Institute for Microstructure Technology, Forschungszentrum Karlsruhe GmbH, P.O. Box 3640, 76021 Karlsruhe, Germany

• Mohr Juergen

  Institute for Microstructure Technology, Forschungszentrum Karlsruhe GmbH, P.O. Box 3640, 76021 Karlsruhe, Germany

• Rabus Dominik

  Institute for Microstructure Technology, Forschungszentrum Karlsruhe GmbH, P.O. Box 3640, 76021 Karlsruhe, Germany

• Ichihashi Yasuhisa

  Institute for Microstructure Technology, Forschungszentrum Karlsruhe GmbH, P.O. Box 3640, 76021 Karlsruhe, Germany

• Bruendel Mathias

  Institute for Microstructure Technology, Forschungszentrum Karlsruhe GmbH, P.O. Box 3640, 76021 Karlsruhe, Germany

関連論文

• Material Investigation of Alicyclic Methacrylate Copolymer for Polymer Waveguide Fabrication
• Influence of Exposure Spectra on Optical Properties of Alicyclic Methacrylate Copolymer Waveguides Fabricated by Deep UV Exposure

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