Material Investigation of Alicyclic Methacrylate Copolymer for Polymer Waveguide Fabrication

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概要

• 論文の詳細を見る

• We investigated the physical and chemical properties of alicyclic methacrylate copolymers and their changes under deep-UV exposure. It was shown that alicyclic methacrylate copolymers have a better thermal stability and a higher refractive index than conventional poly(methyl methacrylate) (PMMA). Fourier transform IR (FTIR) spectra show the scission of the carbonyl group of the alicyclic methacrylate copolymers by deep-UV exposure similar to that of PMMA. This structural modification results in a local and controllable increase in refractive index in the exposed areas of the polymer surface. We fabricated polymer waveguides from alicyclic methacrylate copolymers by conventional photolithography using quartz/chromium mask. The minimum propagation loss of the straight waveguide with a 7.5 μm width was 2 dB/cm at 1550 nm.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-04-15

著者

• Henzi Patric

  Institute for Microstructure Technology, Forschungszentrum Karlsruhe GmbH, P.O. Box 3640, 76021 Karlsruhe, Germany

• Mohr Juergen

  Institute for Microstructure Technology, Forschungszentrum Karlsruhe GmbH, P.O. Box 3640, 76021 Karlsruhe, Germany

• Rabus Dominik

  Institute for Microstructure Technology, Forschungszentrum Karlsruhe GmbH, P.O. Box 3640, 76021 Karlsruhe, Germany

• Ichihashi Yasuhisa

  Institute for Microstructure Technology, Forschungszentrum Karlsruhe GmbH, P.O. Box 3640, 76021 Karlsruhe, Germany

• Bruendel Mathias

  Institute for Microstructure Technology, Forschungszentrum Karlsruhe GmbH, P.O. Box 3640, 76021 Karlsruhe, Germany

関連論文

• Material Investigation of Alicyclic Methacrylate Copolymer for Polymer Waveguide Fabrication
• Influence of Exposure Spectra on Optical Properties of Alicyclic Methacrylate Copolymer Waveguides Fabricated by Deep UV Exposure

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