Eight-Phase-Level Diffractive Microlens for Beam Splitting Using LIGA-Like Process
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概要
- 論文の詳細を見る
An eight-level diffractive microlens (DML) array for beam splitting is designed and fabricated by a LIGA-like process. The pattern of this dual-focal-point DML was designed using the optimal rotation-angle method and realized by silicon etching, nickel (Ni) electroplating and hot embossing. Tetraethoxysilane (TEOS) oxide etching and specially designed demold techniques were developed and employed in the fabrication process to minimize the related processing errors such as misalignment and tilting so that the accuracy of DML could be ensured. The obtained poly(methyl methacrylate) (PMMA)-based DML was measured to confirm the optical properties and the results showed that the diffraction efficiency error and uniformity error were successfully kept under 5.19 and 1.52%, respectively.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-04-15
著者
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Liao Yunn-shiuan
Department Of Mechanical Engineering National Taiwan University
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Liao Yunn-Shiuan
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan, R.O.C.
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Yang Jauh-Jung
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan, R.O.C.
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Chen Chi-Feng
Department of Mechanical Engineering, Institute of Opto-Mechatronics Engineering, National Central University, Chung-li, Taiwan, R.O.C.
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