Fabrication of arrayed microneedles by laser LIGA process(Laser processing)

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概要

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• The process for the fabrication of polymer based high aspect ratio arrayed microneedles by laser LIGA technology is investigated in this study. ArF excimer laser with projective mask is used to create arrayed microholes on BK7 glass. The micromolds formed by microholes are subsequently filled with epoxy resist, and then the glass substrate is etched away to obtain the arrayed microneedles. It is found that the higher laser fluence is beneficial for the formation of microneedles with a smaller tip radius. The higher repetition rate leads to stronger plasma shielding effect, and the molded microneedles with a smaller tip radius. Based on our study, the polymer based microneedles with the tip radius of less than 100nm can be obtained by the laser LIGA process.

• 一般社団法人日本機械学会の論文
• 2005-10-18

著者

• Liao Yunn-shiuan

  Department Of Mechanical Engineering National Taiwan University

• CHEN Ying-Tung

  Department of Mechanical Engineering, National Taiwan University

• Chen Ta-Tung

  Department of Mechanical Engineering, Chung-Cheng Institute of Technology

• Chen Ying-tung

  Department Of Mechanical Engineering National Taiwan University

• Chen Ta-tung

  Department Of Mechanical Engineering Chung-cheng Institute Of Technology

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