Energy Dissipation Mechanisms in Lead Zirconate Titanate Thin Film Transduced Micro Cantilevers

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概要

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• A high quality factor (Q-factor) is most desirable for resonant mass sensors because their sensitivity greatly depends on the detectable frequency shift after mass adsorption. The authors fabricated lead zirconate titanate (PZT) thin film transduced micro cantilevers and studied the energy dissipation mechanisms to better understand the essential aspects affecting the Q-factor. It was found that energy dissipation induced by the multi-layered device structure and the PZT thin film was noteworthy even under atmospheric pressure conditions. The effects of the PZT film on the energy dissipation became dominant under reduced pressure. Accordingly, the Q-factors of cantilevers without PZT film became larger than those with PZT film when pressure was reduced into the molecular flow region. The single-layered SiO2 cantilever exhibited the largest intrinsic Q-factor. The electro-mechanical conversion in the PZT film and the thermoelastic damping caused by the property difference between each layer contributed significantly to the energy dissipation.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-11-15

著者

• ZHANG Yi

  Networked MEMS Technology Group, Advanced Manufacturing Research Institute, National Institute of Ad

• LU Jian

  Networked MEMS Technology Group, Advanced Manufacturing Research Institute, National Institute of Ad

• MAEDA Ryutaro

  Networked MEMS Technology Group, Advanced Manufacturing Research Institute, National Institute of Ad

• Mihara Takashi

  Future Creation Lab. Olympus Corporation

• IKEHARA Tsuyoshi

  Networked MEMS Technology Group, National Institute of Advanced Industrial Science and Technology (A

• Mihara Takashi

  Future Creation Lab., Olympus Corporation, Shinjuku Monolith, 2-3-1 Nishi-Shinjuku, Shinjuku-ku, Tokyo 163-0914, Japan

• Zhang Yi

  Networked MEMS Technology Group, National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan

関連論文

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• Hydrogen Permeation of Thin Pd-25Ag Membranes Prepared by Cold Rolling and Microsystem Technology
• Sensitivity of Micro Cantilever Mass Sensor Transduced by PZT Film
• Volatile Organic Compound Sensing by Gold Nanoparticles Capped with Calix[4]arene Ligand
• Frequency Stability of a Closed-Loop Oscillator Using Micro-Electro-Mechanical Cantilever Resonator Against Temperature Fluctuation (Special Issue : Microprocesses and Nanotechnology)
• High Quality Factor Silicon Cantilever Transduced by Piezoelectric Lead Zirconate Titanate Film for Mass Sensing Applications
• Energy Dissipation Mechanisms in Lead Zirconate Titanate Thin Film Transduced Micro Cantilevers

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