Frequency Stability of a Closed-Loop Oscillator Using Micro-Electro-Mechanical Cantilever Resonator Against Temperature Fluctuation (Special Issue : Microprocesses and Nanotechnology)
スポンサーリンク
概要
著者
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IKEHARA Tsuyoshi
National Institute of Advanced Industrial Science and Technology (AIST)
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Mihara Takashi
Future Creation Lab. Olympus Corporation
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Konno Mitsuo
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan
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Murakami Sunao
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan
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