Control the Shape of Buckling Micromachined Beam using Plasma Chemistry Bonding Technology

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概要

• 論文の詳細を見る

• In this study, we report a novel method for controlling the shape of a micromachined bridge (clamped-clamped beam) by plasma surface modification. In short, the microbridge can be tuned to either buckle upward or downward using plasma treatment. To demonstrate the feasibility of this approach, NH3 plasma treatments were employed to control the direction of buckling amplitude for a SiO2 microbridge. Furthermore, the shape of a buckling microbridge can also be adjusted by the same technique. The buckling profiles predicted by finite element analysis are in agreement with those determined from the measurement.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-10-30

著者

• Su Wang

  Mems Institute National Tsing-hua University

• Fang Weileun

  Mems Institute National Tsing-hua University

• Tsai Ming

  National Nano Device Laboratory

• LEE Sheng

  Power Mechanical Engineering, National Tsing-Hua University

• LIN Cheng

  Power Mechanical Engineering, National Tsing-Hua University

• YIP Ming

  Power Mechanical Engineering, National Tsing-Hua University

• Su Wang

  MEMS Institute, National Tsing-Hua University, Hsinchu, Taiwan

• Lin Cheng

  Power Mechanical Engineering, National Tsing-Hua University, Hsinchu, Taiwan

• Yip Ming

  Power Mechanical Engineering, National Tsing-Hua University, Hsinchu, Taiwan

• Tsai Ming

  National Nano Device Laboratory, Hsinchu, Taiwan

• Lee Sheng

  Power Mechanical Engineering, National Tsing-Hua University, Hsinchu, Taiwan

関連論文

• Control the Shape of Buckling Micromachined Beam using Plasma Chemistry Bonding Technology
• Control the Shape of Buckling Micromachined Beam using Plasma Chemistry Bonding Technology

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