Control the Shape of Buckling Micromachined Beam using Plasma Chemistry Bonding Technology
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-10-30
著者
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Su Wang
Mems Institute National Tsing-hua University
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Fang Weileun
Mems Institute National Tsing-hua University
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Tsai Ming
National Nano Device Laboratory
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LEE Sheng
Power Mechanical Engineering, National Tsing-Hua University
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LIN Cheng
Power Mechanical Engineering, National Tsing-Hua University
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YIP Ming
Power Mechanical Engineering, National Tsing-Hua University
関連論文
- Control the Shape of Buckling Micromachined Beam using Plasma Chemistry Bonding Technology
- Control the Shape of Buckling Micromachined Beam using Plasma Chemistry Bonding Technology