Spectroscopic Study on Vibrational Distribution of N2 C3$\Pi$ and B3$\Pi$ States in Microwave Nitrogen Discharge

概要

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We examined the vibrational and rotational temperatures of the C3$\Pi$ and B3$\Pi$ states of N2 by optical emission spectroscopy. We measured the band spectra (first and second positive systems) of N2 compared the experimentally measured and the calculated spectra to determine the actual vibrational and rotational temperatures of the generated plasma. We generated a microwave discharge nitrogen plasma in a cylindrical quartz tube (26 mm i.d.) with a discharge pressure of 0.5–1.0 Torr. The microwave frequency was 2.45 GHz and the output power was set at 600 W. It was found that $T_{\text{v}}\approx 0.5--0.7$ eV and $T_{\text{r}}\approx 0.07--0.15$ eV at B3$\Pi$ ($v=7$, 8 and 9), whereas $T_{\text{v}}\approx 0.65--0.9$ eV and $T_{\text{r}}\approx 0.06--0.16$ eV at C3$\Pi$ ($v=0$ and 1). We also discussed the measured vibrational populations using theoretical calculations, in which the variation in the number density was expressed in terms of molecular processes.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2006-10-15