Evaluation of Electron Energy Distribution Function in Microwave Discharge Plasmas by Spectroscopic Diagnostics with Collisional Radiative Model

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概要

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• The effect of the electron energy distribution function (EEDF) on the population distribution of excited states is investigated in He and Ar plasmas sustained by a 2.45 GHz microwave at a discharge pressure of 1–5 Torr. The EEDF is measured with a Langmuir probe by Druyvesteyn’s method and used as the input parameter of the collisional-radiative (CR) model calculation. The calculated population density of the excited states is compared with the results of optical emission spectroscopic measurement. Reasonable agreement is found between them. It is also confirmed that the measured EEDFs was depleted at energies above the first excitation potential of the discharge gas atoms. When we assume a Maxwellian EEDF and calculate the population distribution of excited states of the argon plasma, we find a marked discrepancy between the populations of excited states observed experimentally and those calculated by the CR model, while a discrepancy for the helium plasma is also found but is less marked.

• 2010-03-25

著者

• Matsuura Haruaki

  Research Laboratory For Nuclear Reactors Tokyo Institute Of Technology

• Sakamoto Takeshi

  Department Of Chemistry And Biotechnology School Of Engineering The University Of Tokyo

• Hiroshi Akatsuka

  Department of Energy Sciences, Tokyo Institute of Technology, 2-12-1-N1-10, O-Okayama, Meguro, Tokyo 152-8550, Japan

• Haruaki Matsuura

  Research Laboratory for Nuclear Reactors, Tokyo Institute of Technology, 2-12-1-N1-10, O-Okayama, Meguro, Tokyo 152-8550, Japan

• Mizuochi Jun

  Department of Energy Sciences, Tokyo Institute of Technology, 2-12-1-N1-10, O-Okayama, Meguro, Tokyo 152-8550, Japan

• Jun Mizuochi

  Department of Energy Sciences, Tokyo Institute of Technology, 2-12-1-N1-10, O-Okayama, Meguro, Tokyo 152-8550, Japan

• Sakamoto Takeshi

  Department of Biofunctional Science, Faculty of Agriculture and Life Science, Hirosaki University

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