Characteristics of Secondary Electron Emission Coefficient and Sputtering Yield for MgAl2O4/MgO Protective Layer in AC-Plasma Display Panels
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概要
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The secondary electron emission coefficient ($\gamma$) and sputtering yield of the MgAl2O4/MgO protective layer has been investigated using $\gamma$-focused ion beam ($\gamma$-FIB) and focused ion beam (FIB) systems, respectively. The MgAl2O4/MgO protective layer has higher $\gamma$ values (from 0.09 to 0.12) than the single MgAl2O4 protective layer (from 0.06 to 0.07) at Ne+ ion energies ranging from 90 to 200 eV. Also it has been found that the secondary electron emission coefficient ($\gamma$) of the MgAl2O4/MgO protective layer is similar to that of the MgO protective layer. Moreover, the MgAl2O4/MgO protective layer has been found to have lower sputtering yields (from 0.25 to 0.35) than the MgO protective layer (from 0.36 to 0.44) for Ga+ ion energies ranging from 10 to 14 keV.
- 2006-10-15
著者
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Jeoung Jin-man
Charged Perticle Beam And Plasma Laboratory Department Of Electrophysics/pdp Research Center Kwangwo
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Choi Eun
Charged Particle Beam And Plasma Laboratory Department Of Electrophysics/pulse Driven Power Research
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Kang Seung-oun
Charged Particle Beam And Plasma Laboratory Department Of Electrophysics
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Jung Kang-Won
Charged Particle Beam and Plasma Laboratory/PDP Research Center, Department of Electrophysics, Kwangwoon University, Seoul 139-701, Korea
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Choi Eun
Charged Particle Beam and Plasma Laboratory/PDP Research Center, Department of Electrophysics, Kwangwoon University, Seoul 139-701, Korea
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Ko Byung-Doc
Charged Particle Beam and Plasma Laboratory/PDP Research Center, Department of Electrophysics, Kwangwoon University, Seoul 139-701, Korea
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Lee Hye-Jung
Charged Particle Beam and Plasma Laboratory/PDP Research Center, Department of Electrophysics, Kwangwoon University, Seoul 139-701, Korea
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Jung Yong-Whan
Charged Particle Beam and Plasma Laboratory/PDP Research Center, Department of Electrophysics, Kwangwoon University, Seoul 139-701, Korea
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Jeoung Jin-Man
Charged Particle Beam and Plasma Laboratory/PDP Research Center, Department of Electrophysics, Kwangwoon University, Seoul 139-701, Korea
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Jeoung Jin-Man
Charged Particle Beam and Plasma Laboratory, Department of Electrophysics/PDP Research Center, Kwangwoon University, Seoul 139-701, Korea
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Kang Seung-Oun
Charged Particle Beam and Plasma Laboratory/PDP Research Center, Department of Electrophysics, Kwangwoon University, Seoul 139-701, Korea
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