LiNbO3 Ultrasonic Transducers with an Inverted-Domain Layer for Radiation to Solid Media
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概要
- 論文の詳細を見る
Heat treatment of lithium niobate (LiNbO3) plates induces domain inversion, thereby yielding a ferroelectric inversion layer. In such a piezoelectric plate with an inversion layer, even-order thickness-extensional modes, as well as odd-order modes, can be excited piezoelectrically. Therefore, ultrasonic transducers using such a piezoelectric plate are expected to operate over a wide frequency range. In this paper, it is shown both theoretically and experimentally that broadband ultrasonic transducers for radiation to solid media can be obtained when the inversion layer is on the side of the acoustic load medium and the inversion layer-to-plate thickness ratio is around 0.3. A 50–110 MHz ultrasonic transducer was fabricated using 36°-rotated $Y$-cut LiNbO3 plates with an inversion layer. The conversion loss characteristic was evaluated when the transducer was bonded to an acoustic medium of fused silica by a low-temperature Au diffusion bonding technique. The 3 dB specific bandwidth was as large as 74% and the minimum conversion loss was as low as 2 dB.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-06-15
著者
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Saito Shigemi
Faculty Of Marine Science And Technology Tokai University
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Nakamura Kiyoshi
Graduate School Of Engineering Tohoku University
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Yamada Ken
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Saito Shigemi
Faculty of Marine Science and Technology, Tokai University, Shizuoka 424-8610, Japan
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Koyama Hirokatsu
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Odakura Satoshi
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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