Lead Zirconate Titanate Thick-Film Ultrasonic Transducer for 1 to 20 MHz Frequency Bands Fabricated by Hydrothermal Polycrystal Growth
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概要
- 論文の詳細を見る
A thickness vibration mode ultrasonic transducer was fabricated by hydrothermal deposition of lead zirconate titanate polycrystalline thick film. This hydrothermal polycrystalline PZT thick-film (HPTF-PZT) ultrasonic transducer was studied for its wide-frequency-band transmission characteristics. The transducer had a 50-μm-thick PZT layer on a 50-μm-thick titanium substrate in an active area of $8\,\text{mm}\times 8\,\text{mm}$. The experimental results showed the HPTF-PZT ultrasonic transducer radiated a single ultrasound pulse in the frequency range from 1 to 20 MHz with a 20 dB deviation. Additionally, this transducer generated a 2 MHz sawtooth ultrasonic wave with odd-and even order-harmonic components from the 2nd to the 11th harmonics. These results indicate that the fabricated ultrasonic transducer has satisfactory wide-band characteristics for a MHz frequency range ultrasonic transmitter.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-06-15
著者
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Ishikawa Mutsuo
Interdisciplinary Graduate School Of Science And Engineering Tokyo Institute Of Technology Departmen
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Kuribayashi Kurosawa
Interdisciplinary Graduate School Of Engineering Tokyo Institute Of Technology
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Takeuchi Shinichi
Faculty of Engineering, Toin University of Yokohama, 1614 Kurogane-cho, Aoba-ku, Yokohama 225-8502, Japan
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Takeuchi Shinichi
Faculty of Biomedical Engineering, Toin University of Yokohama, 1614 Kurogane-cho, Aoba-ku, Yokohama 225-8502, Japan
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Endoh Akito
Faculty of Engineering, Toin University of Yokohama, 1614 Kurogane-cho, Aoba-ku, Yokohama 225-8502, Japan
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Kurosawa Minoru
Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, Department of Advanced Applied Electronics, 4259 Nagatutamati, Midori-ku, Yokohama, Kanagawa 226-8502, Japan
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