TeOX-Based Film for Heat-Mode Inorganic Photoresist Mastering

概要

論文の詳細を見る
A TeOX-based inorganic photoresist was developed for mastering utilizing heat-mode recording. We discovered that the novel organic thermal isolation film markedly improved the patterning resolution of phase change mastering. We demonstrated Blu-ray Disc read only memory (ROM) mastering with a blue laser diode, using the TeOX-based photoresist and the thermal isolation film. The jitter values of a replicated disc were less than 6% at the full range of the disc. It was also proven that the mastering system is capable of recording 80 nm L/S. In addition, the mechanism of development was clarified.
2005-05-15