Study on 40 Gbits/inch2 Density Molding Using Heat Insulated Mold
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概要
- 論文の詳細を見る
We investigated the high-density molding of a 40 Gbits/inch2 stamper with steep wall pits. This density corresponds to about 60 Gbytes in a 120 mm-diameter disk. We applied the heat-insulated structure to the mold, in which a heat insulating plate was located at the back of the stamper, to reduce the mold temperature. We obtained substrates without pit deformation over the entire pit area as the result of the combination of this mold and the low mold opening speed.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2003-02-15
著者
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Kawasaki Yoshihiro
Storage Media Systems Development Center Matsushita Electric Industrial Co. Ltd.
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Ohno Eiji
Storage Media Systems Development Center Matsushita Electric Industrial Co. Ltd.
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Inoue Kazuo
Storage Media Systems Development Center Matsushita Electric Industrial Co. Ltd.
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Hayashi Kazuhiro
Storage Media Systems Development Center Matsushita Electric Industrial Co. Ltd.
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