Post-treatment Method of Producing Ordered Array of Anodic Aluminum Oxide Using General Purity Commercial (99.7%) Aluminum

概要

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A new and simplified method of fabricating anodic aluminum oxide has been developed. This new method uses anodization but follows a route different from the commonly known 1- or 2-step anodization. General-purity (99.7%) commercial aluminum is used instead of the high-purity aluminum required in conventional anodization. The disordered arrangements of pores that initially form on the surface of aluminum rearranged by self-diffusion inside the anodic aluminum oxide (AAO) layer via long-term heat treatment. The enlargement of the pores on AAO that crystallized to $\gamma$ phase was achieved by pore widening. Uniformly distributed nanopores with a diameter of 75 nm and wall a thickness of 16 nm were formed on a 9 μm thick AAO film. These ordered nanochannels were obtained over an area of several square millimeters, with a density of $1.4\times 10^{10}$ pores per cm2.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2005-03-15