A Three-Dimensional Micro-Electro-Mechanical System (MEMS) Optical Switch Module Using Low-Cost Highly Accurate Polymer Components
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概要
- 論文の詳細を見る
This paper describes a large-scale, compact three-dimensional (3D) micro-electro-mechanical system (MEMS) optical switch using two-axis tilt mirror arrays and free-space optics. This switch structure provides a practical solution for constructing a large-scale switching fabric due to its high density and low cost features. The MEMS mirrors are made of single-crystal silicon with integrated gimbal structures and are tilted two dimensionally by electrostatic force. In the mirrors, the driving electrode has a three-dimensional terrace structure and they effectively reduce the control voltage compared with conventional MEMS mirrors. The free-space optics consists of low-cost high-precision polymer components and is passively assembled in a series of simple steps. A prototype module with 100-channel optical fiber input/output has an overall hardware volume of approximately 170 cc ($80\times 60\times 35$ mm), and this exhibited a low coupling loss of 4.0 dB and a switching time of 3 msec.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-08-15
著者
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Uenishi Yuji
Ntt Microsystem Integration Laboratories
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Higurashi Eiji
Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corp.
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Sawada Renshi
Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corp.
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Takeuchi Nobuyuki
Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corp.
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Yamamoto Tsuyoshi
Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corp.
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Shimizu Akira
Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corp.
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Shimizu Akira
NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corporation, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan
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Sawada Renshi
NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corporation, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan
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Yamaguchi Johji
NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corporation, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan
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Higurashi Eiji
NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corporation, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan
関連論文
- OD-04 CHARACTERISTICS AND CONTROL OF MEMS MIRRORS FOR OPTICAL CROSS-CONNECT SWITCH
- Free-Space Optical Switch Modules Using Risley Optical Beam Deflectors
- Fabrication of Optical Microelectromechanical-System Switches Having Multilevel Mirror-Drive Electrodes
- A Three-Dimensional Micro-Electro-Mechanical System (MEMS) Optical Switch Module Using Low-Cost Highly Accurate Polymer Components
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