OD-04 CHARACTERISTICS AND CONTROL OF MEMS MIRRORS FOR OPTICAL CROSS-CONNECT SWITCH
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概要
- 論文の詳細を見る
A MEMS mirror that we are developing for a three-dimensional MEMS optical switch module features a terraced electrode structure that enables low driving voltage. The mirror can tilt more than 4 degrees at less than 80-V driving voltage. A control method for the MEMS mirror achieves a short switching time. We demonstrate 3 msec switching time.
- 一般社団法人日本機械学会の論文
著者
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Higurashi E
Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corporation
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Uenishi Yuji
Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corporation
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Uenishi Yuji
Ntt Microsystem Integration Laboratories
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Higurashi Eiji
Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corporation
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Higurashi Eiji
Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corp.
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Yamaguchi Joji
NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corp.
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Takeuchi Nobuyuki
NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corp.
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Shimizu Akira
NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corp.
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Yamamoto Tsuyoshi
NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corp.
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Sawada Renshi
NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corp.
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Sawada Renshi
Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corp.
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Yamaguchi Joji
Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corp.
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Takeuchi Nobuyuki
Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corp.
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Yamamoto Tsuyoshi
Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corp.
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Shimizu Akira
Ntt Microsystem Integration Laboratories Nippon Telegraph And Telephone Corp.
関連論文
- OD-04 CHARACTERISTICS AND CONTROL OF MEMS MIRRORS FOR OPTICAL CROSS-CONNECT SWITCH
- MCH-03 Effect of AC drive in control of MEMS mirror tilt angle(Micro/Nanomechatronics II,Technical Program of Oral Presentations)
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- Fabrication of Optical Microelectromechanical-System Switches Having Multilevel Mirror-Drive Electrodes
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