Combinatorial Ion Implantation Techniques Application to Optical Characteristics of ZnO

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概要

• 論文の詳細を見る

• We report on the application of combinatorial ion implantation techniques such as the moving mask system and the digital scanning system. The combinatorial library formed by ion implantation was used to optimize the green light emission from ZnO thin films.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 2004-08-15

著者

• HISHITA Syunichi

  Advanced Material Laboratory, National Institute for Materials Science

• Sakaguchi Isao

  Advanced Materials Laboratory (aml) National Institute For Materials Science (nims)

• Haneda Hajime

  Advanced Material Laboratory, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan

• Hishita Syunichi

  Advanced Material Laboratory, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan

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