Efficient microvalve driven by a Si-Ni bimorph

概要

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We report on a new type of high-throughput thermally driven microvalve fabricated by using micro-electromechanical system (MEMS) technology. A miniaturized Si–Ni bimorph actuator was incorporated into the valve structure. This allowed the realization of both larger force generation and a longer stroke (the actuation length) combined with shortened response time. Also, a low-voltage actuation (${<}3$ V) and low-energy consumption (${<}0.2$ W) were achieved. The actual size of the fabricated valve is $7.3 \times 5.8 \times 1.2$ mm3. The flow rate of 0 to 500 cm3/min at an air pressure of 47 kPa with a low leakage rate of 0.03 cm3/min and good linearity of air pressure control were achieved. The principles of design and experimental results on flow rate control are presented and discussed.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2003-07-15